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Investigation of rf power absorption in the plasma of helicon ion source
Mordyk, S., Alexenko, O., Miroshnichenko, V., Storizhko, V., Stepanov, K., Olshansky, V.Volume:
79
Year:
2008
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2802573
File:
PDF, 844 KB
english, 2008