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Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors
Xu, Lei, Wang, Yuchen, Zhou, Hong, Liu, Yanxiang, Li, Tie, Wang, YuelinVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2208219
Date:
December, 2012
File:
PDF, 1.39 MB
english, 2012