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Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration
Rademacher, Daniel, Zickenrott, Tobias, Vergöhl, MichaelVolume:
532
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.11.101
Date:
April, 2013
File:
PDF, 1.42 MB
english, 2013