Growth diagram and morphologies of AlN thin films grown by...

Journal of Applied Physics 2003 Vol. 93; Iss. 12

Growth diagram and morphologies of AlN thin films grown by molecular beam epitaxy

Koblmueller, G., Averbeck, R., Geelhaar, L., Riechert, H., Hösler, W., Pongratz, P.
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Volume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1575929
File:
PDF, 581 KB
english, 2003
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