![](/img/cover-not-exists.png)
Refinement of Monte Carlo simulations of electron–specimen interaction in low-voltage SEM
Kieft, Erik, Bosch, EricVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/21/215310
Date:
November, 2008
File:
PDF, 679 KB
english, 2008