Modelling and validation of air damping in perforated gold and silicon MEMS plates
De Pasquale, Giorgio, Veijola, Timo, Somà, AurelioVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/1/015010
Date:
January, 2010
File:
PDF, 1.16 MB
english, 2010