Design optimization of a high performance silicon MEMS...

Journal of Micromechanics and Microengineering 2006 / 10 Vol. 16; Iss. 10

Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications

Pramanik, C, Saha, H, Gangopadhyay, U
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Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/10/019
Date:
October, 2006
File:
PDF, 154 KB
english, 2006
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