Development of a multi-degree-of-freedom micropositioning, vibration isolation and vibration suppression system
Jaensch, M, Lampérth, M UVolume:
16
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/16/2/020
Date:
April, 2007
File:
PDF, 755 KB
english, 2007