A novel fabrication method for suspended high-aspect-ratio...

A novel fabrication method for suspended high-aspect-ratio microstructures

Yang, Yao-Joe, Kuo, Wen-Cheng
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/11/027
Date:
November, 2005
File:
PDF, 2.12 MB
english, 2005
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