![](/img/cover-not-exists.png)
[IEEE ESSDERC 2007 - 37th European Solid State Device Research Conference - Muenchen, Germany (2007.09.11-2007.09.13)] ESSDERC 2007 - 37th European Solid State Device Research Conference - Self-aligned μTrench phase-change memory cell architecture for 90nm technology and beyond
Pirovano, A., Pellizzer, F., Tortorelli, I., Harrigan, R., Magistretti, M., Petruzza, P., Varesi, E., Erbetta, D., Marangon, T., Bedeschi, F., Fackenthal, R., Atwood, G., Bez, R.Year:
2007
Language:
english
DOI:
10.1109/ESSDERC.2007.4430918
File:
PDF, 311 KB
english, 2007