![](/img/cover-not-exists.png)
[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - The development of RF generator for remote plasma cleaning source
Soo-Seok Kim,, Dae-Kyu Choi,Year:
2003
Language:
english
DOI:
10.1109/PLASMA.2003.1228883
File:
PDF, 70 KB
english, 2003