[IEEE 30th International Conference on Plasma Science -...

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[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - The development of RF generator for remote plasma cleaning source

Soo-Seok Kim,, Dae-Kyu Choi,
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Year:
2003
Language:
english
DOI:
10.1109/PLASMA.2003.1228883
File:
PDF, 70 KB
english, 2003
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