CMOS-MEMS Capacitive Humidity Sensor

Journal of Microelectromechanical Systems 2010 / 02 Vol. 19; Iss. 1

CMOS-MEMS Capacitive Humidity Sensor

Lazarus, Nathan, Bedair, Sarah S., Lo, Chiung-C., Fedder, Gary K.
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2009.2036584
Date:
February, 2010
File:
PDF, 1019 KB
english, 2010
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