A Fully Packaged CMOS Interdigital Capacitive Humidity...

IEEE Sensors Journal 2011 / 11 Vol. 11; Iss. 11

A Fully Packaged CMOS Interdigital Capacitive Humidity Sensor With Polysilicon Heaters

Zhao, Cheng-Long, Qin, Ming, Huang, Qing-An
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Volume:
11
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2011.2154325
Date:
November, 2011
File:
PDF, 1.02 MB
english, 2011
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