A MEMS rotary comb mechanism for harvesting the kinetic...

A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations

Yang, Bin, Lee, Chengkuo, Kotlanka, Rama Krishna, Xie, Jin, Lim, Siak Piang
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/6/065017
Date:
June, 2010
File:
PDF, 1.83 MB
english, 2010
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