[Lviv Polytechnic Nat. Univ International Conference on the Experience of Designing and Application of CAD Systems in Microelectronics - Slavske, Ukraine (18-22 Feb. 2003)] The Experience of Designing and Application of CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference. - Analytical modelling and simulations of a MEMS micro-mirror - MATLAB implementation

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