[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - 2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage
Chu Duc, T., Lau, G. K., Wei, J., Sarro, P. M.Year:
2007
Language:
english
DOI:
10.1109/MEMSYS.2007.4433168
File:
PDF, 1.52 MB
english, 2007