SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Design for Manufacturability through Design-Process Integration - Real-time VT5 model coverage calculations during OPC simulations
Graur, Ioana, Mansfield, Scott, Gheith, Moahmed, Al-Imam, Mohamed, Wong, Alfred K. K., Singh, Vivek K.Volume:
6521
Year:
2007
Language:
english
DOI:
10.1117/12.712394
File:
PDF, 272 KB
english, 2007