Roughness conformity during tungsten film growth: An...

Physical Review B 2005 / 7 Vol. 72; Iss. 4

Roughness conformity during tungsten film growth: An in situ synchrotron x-ray scattering study

Peverini, Luca, Ziegler, Eric, Bigault, Thierry, Kozhevnikov, Igor
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
72
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.72.045445
Date:
July, 2005
File:
PDF, 611 KB
english, 2005
Conversion to is in progress
Conversion to is failed