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On the induced microstructure changes of the amorphous carbon nitride films during annealing
Lejeune, M., Durand-Drouhin, O., Charvet, S., Zeinert, A., Benlahsen, M.Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2747218
File:
PDF, 820 KB
english, 2007