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Infrared spectroscopy characterization of 3C–SiC epitaxial layers on silicon
Pluchery, Olivier, Costantini, Jean-MarcVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/49/495101
Date:
December, 2012
File:
PDF, 619 KB
english, 2012