Characteristics of multi-element (ZrTaNbTiW)N films...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 / 4 Vol. 301

Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation

Feng, Xingguo, Tang, Guangze, Ma, Xinxin, Sun, Mingren, Wang, Liqin
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Volume:
301
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.03.001
Date:
April, 2013
File:
PDF, 481 KB
english, 2013
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