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[IEEE 2008 8th IEEE Conference on Nanotechnology (NANO) - Arlington, Texas, USA (2008.08.18-2008.08.21)] 2008 8th IEEE Conference on Nanotechnology - Computer Integrated Plasma Nano Manufacturing Workcell
Zhang, Jiangbo, Lai, King W. C., Narendra, Jeffri, Xi, Ning, Grotjohn, Timothy, Asmussen, JesYear:
2008
Language:
english
DOI:
10.1109/NANO.2008.257
File:
PDF, 370 KB
english, 2008