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An ultra-precision XY/spl theta//sub Z/ piezo-micropositioner. I. Design and analysis
Shuo Hung Chang,, Chung Kai Tseng,, Hon Chan Chien,Volume:
46
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.775656
Date:
July, 1999
File:
PDF, 897 KB
english, 1999