Design and fabrication of PMMA-micromachined fluid lens based on electromagnetic actuation on PMMA–PDMS bonded membrane
Lee, June Kyoo, Park, Kyung-Woo, Choi, Ju Chan, Kim, Hak-Rin, Kong, Seong HoVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115028
Date:
November, 2012
File:
PDF, 2.19 MB
english, 2012