Epitaxial growth of LaAlO3 on SrTiO3-buffered Si (001)...

Journal of Crystal Growth 2013 / 1 Vol. 363

Epitaxial growth of LaAlO3 on SrTiO3-buffered Si (001) substrates by atomic layer deposition

Ngo, Thong Q., Posadas, Agham, McDaniel, Martin D., Ferrer, Domingo A., Bruley, John, Breslin, Chris, Demkov, Alexander A., Ekerdt, John G.
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Volume:
363
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2012.10.032
Date:
January, 2013
File:
PDF, 1.26 MB
english, 2013
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