Residual Strain Evaluation by Cross-Sectional...

Japanese Journal of Applied Physics 2011 / 1 Vol. 50

Residual Strain Evaluation by Cross-Sectional Micro-Reflectance Spectroscopy of Freestanding GaN Grown by Hydride Vapor Phase Epitaxy

Geng, Huiyuan, Yamaguchi, A Atsushi, Sunakawa, Haruo, Sumi, Norihiko, Yamamoto, Kazutomi, Usui, Akira
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.01AC01
Date:
January, 2011
File:
PDF, 346 KB
english, 2011
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