![](/img/cover-not-exists.png)
Optical and surface analysis of DC-reactive sputtered AlN films
Mahmood, A., Machorro, R., Muhl, S., Heiras, J., Castillón, F.F., Farı́as, M.H., Andrade, E.Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00076-1
Date:
August, 2003
File:
PDF, 164 KB
english, 2003