Optical and surface analysis of DC-reactive sputtered AlN...

Diamond and Related Materials 2003 / 8 Vol. 12; Iss. 8

Optical and surface analysis of DC-reactive sputtered AlN films

Mahmood, A., Machorro, R., Muhl, S., Heiras, J., Castillón, F.F., Farı́as, M.H., Andrade, E.
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Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00076-1
Date:
August, 2003
File:
PDF, 164 KB
english, 2003
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