Residual stress analysis of TiN film fabricated by plasma...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 / 2 Vol. 297

Residual stress analysis of TiN film fabricated by plasma immersion ion implantation and deposition process

Liu, Hongxi, Xu, Qian, Zhang, Xiaowei, Wang, Chuanqi, Tang, Baoyin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
297
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2012.12.015
Date:
February, 2013
File:
PDF, 467 KB
english, 2013
Conversion to is in progress
Conversion to is failed