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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - High frequency torsional MEMS scanner for displays
Baran, U., Brown, D., Holmstrom, S., Balma, D., Davis, W. O., Mazzalai, A., Muralt, P., Urey, H.Year:
2012
Language:
english
DOI:
10.1109/MEMSYS.2012.6170191
File:
PDF, 4.36 MB
english, 2012