Comparative study of etching high crystalline quality AlN...

Journal of Crystal Growth 2013 / 3 Vol. 366

Comparative study of etching high crystalline quality AlN and GaN

Guo, W., Xie, J., Akouala, C., Mita, S., Rice, A., Tweedie, J., Bryan, I., Collazo, R., Sitar, Z.
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Volume:
366
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2012.12.141
Date:
March, 2013
File:
PDF, 947 KB
english, 2013
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