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[IEEE 2012 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2012.12.10-2012.12.13)] 2012 International Electron Devices Meeting - VLSI platform for the monolithic integration of single-crystal Si NEMS capacitive resonators with low-cost CMOS
Arcamone, J., Savoye, M., Arndt, G., Philippe, J., Marcoux, C., Colinet, E., Duraffourg, L., Magis, T., Laurens, M., Monroy-Aguirre, A., Mazoyer, P., Ancey, P., Robert, P., Ollier, E.Year:
2012
Language:
english
DOI:
10.1109/IEDM.2012.6479048
File:
PDF, 2.30 MB
english, 2012