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Effects of Limiting Orifice (Anode) Geometries on Charged Particle Characteristics in an Analytical Radiofrequency Glow Discharge as Determined by Langmuir, Current and Voltage Probes
YE, YUANCAI, MARCUS, R. KENNETHVolume:
12
Year:
1997
Language:
english
Journal:
Journal of Analytical Atomic Spectrometry
DOI:
10.1039/A606346B
File:
PDF, 470 KB
english, 1997