Effects of Limiting Orifice (Anode) Geometries on Charged...

Effects of Limiting Orifice (Anode) Geometries on Charged Particle Characteristics in an Analytical Radiofrequency Glow Discharge as Determined by Langmuir, Current and Voltage Probes

YE, YUANCAI, MARCUS, R. KENNETH
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Volume:
12
Year:
1997
Language:
english
Journal:
Journal of Analytical Atomic Spectrometry
DOI:
10.1039/A606346B
File:
PDF, 470 KB
english, 1997
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