Experiment and modeling of the deposition of...

Journal of Applied Physics 2006 Vol. 100; Iss. 2

Experiment and modeling of the deposition of ultrananocrystalline diamond films using hot filament chemical vapor deposition and Ar∕CH[sub 4]∕H[sub 2] gas mixtures: A generalized mechanism for ultrananocrystalline diamond growth

May, P. W., Mankelevich, Yu. A.
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Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2214304
File:
PDF, 1.17 MB
english, 2006
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