[MEMS Reference Shelf] MEMS Reliability || Failure Modes...

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[MEMS Reference Shelf] MEMS Reliability || Failure Modes and Mechanisms: Failure Modes and Mechanisms in MEMS

Hartzell, Allyson L., da Silva, Mark G., Shea, Herbert R.
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Volume:
10.1007/97
Year:
2011
Language:
english
DOI:
10.1007/978-1-4419-6018-4_3
File:
PDF, 2.28 MB
english, 2011
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