[IEEE 2012 IEEE 62nd Electronic Components and Technology...

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[IEEE 2012 IEEE 62nd Electronic Components and Technology Conference (ECTC) - San Diego, CA, USA (2012.05.29-2012.06.1)] 2012 IEEE 62nd Electronic Components and Technology Conference - Methods for reliability assessment of MEMS devices — Case studies of a MEMS microphone and a 3-axis MEMS gyroscope

Hokka, J., Raami, J., Hyvonen, H., Broas, M., Makkonen, J., Li, J., Mattila, T. T., Paulasto-Krockel, M.
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Year:
2012
Language:
english
DOI:
10.1109/ECTC.2012.6248807
File:
PDF, 1.40 MB
english, 2012
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