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[Advanced Micro and Nanosystems] System-Level Modeling of MEMS (Bechtold/System-Level Modeling of MEMS) || Linear and Nonlinear Model Order Reduction for MEMS Electrostatic Actuators
Bechtold, Tamara, Schrag, Gabriele, Feng, LihongYear:
2013
Language:
english
DOI:
10.1002/9783527647132.ch11
File:
PDF, 390 KB
english, 2013