A capacitive probe with shaped probe bias for ion flux...

Review of Scientific Instruments 2008 Vol. 79; Iss. 11

A capacitive probe with shaped probe bias for ion flux measurements in depositing plasmas

Petcu, M. C., Bronneberg, A. C., Sarkar, A., Blauw, M. A., Creatore, M., van de Sanden, M. C. M.
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Volume:
79
Year:
2008
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3020709
File:
PDF, 802 KB
english, 2008
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