Electromagnetic effects in high-frequency capacitive...

Electromagnetic effects in high-frequency capacitive discharges used for plasma processing

Chabert, P
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Volume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/3/R01
Date:
February, 2007
File:
PDF, 849 KB
english, 2007
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