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Investigation of the sustaining mechanisms of dc magnetron discharges and consequences for I – V characteristics
Musschoot, J, Depla, D, Buyle, G, Haemers, J, De Gryse, RVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/1/015209
Date:
January, 2008
File:
PDF, 189 KB
english, 2008