Effects of Substrate Pre-deposition Annealing and Deposition Parameters on the Properties of RF Sputter-deposited ZnO Films
Oder, T. N., McMaster, M., Smith, A., Velpukonda, N., Sternagle, D.Volume:
1394
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.826
Date:
January, 2012
File:
PDF, 395 KB
english, 2012