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Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated Microstructures
Shavezipur, M., Gou, Wenjuan, Carraro, Carlo, Maboudian, RoyaVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2189363
Date:
June, 2012
File:
PDF, 926 KB
english, 2012