Investigation on indium diffusion in silicon

Journal of Applied Physics 2002 Vol. 92; Iss. 3

Investigation on indium diffusion in silicon

Solmi, S., Parisini, A., Bersani, M., Giubertoni, D., Soncini, V., Carnevale, G., Benvenuti, A., Marmiroli, A.
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Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1492861
File:
PDF, 239 KB
english, 2002
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