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Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope
Wang, Wen, Oh, Haekwan, Lee, Keekeun, Yoon, Sungjin, Yang, SangsikVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.06FK09
Date:
June, 2009
File:
PDF, 840 KB
english, 2009