High-Performance Partially Depleted SOI PFETs With In Situ...

IEEE Electron Device Letters 2011 / 03 Vol. 32; Iss. 3

High-Performance Partially Depleted SOI PFETs With In Situ Doped SiGe Raised Source/Drain and Implant-Free Extension

Khakifirooz, Ali, Cheng, Kangguo, Cai, Jin, Kimball, Anne, Kulkarni, Pranita, Reznicek, Alexander, Adam, Thomas, Edge, Lisa, Bu, Huiming, Doris, Bruce, Shahidi, Ghavam
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Volume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2010.2099639
Date:
March, 2011
File:
PDF, 127 KB
english, 2011
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