[IEEE 2010 IEEE Nanotechnology Materials and Devices Conference (NMDC) - Monterey, CA, USA (2010.10.12-2010.10.15)] 2010 IEEE Nanotechnology Materials and Devices Conference - Reliability properties in sub-50nm high performance high-k/metal gate stacks SiGe pMOSFETs
Park, Min Sang, Kang, Chang Yong, Choi, Do-Young, Sohn, Chang-Woo, Jeong, Eui-Young, Chung, Jinyong, Lee, Jeong-Soo, Jeong, Yoon-HaYear:
2010
Language:
english
DOI:
10.1109/NMDC.2010.5651918
File:
PDF, 475 KB
english, 2010