[AIP RARIFIED GAS DYNAMICS: Proceedings of the 26th International Symposium on Rarified Gas Dynamics - Kyoto (Japan) (20–25 July 2008)] AIP Conference Proceedings - Direct Simulation Monte Carlo Simulations of Low Pressure Semiconductor Plasma Processing
Gochberg, L. A., Ozawa, T., Deng, H., Levin, D. A., Abe, TakashiYear:
2008
Language:
english
DOI:
10.1063/1.3076614
File:
PDF, 995 KB
english, 2008