Influence of substrate bias voltage on structure and...

Diamond and Related Materials 2007 / 1 Vol. 16; Iss. 1

Influence of substrate bias voltage on structure and properties of hard Si–B–C–N films prepared by reactive magnetron sputtering

Houška, J., Vlček, J., Potocký, Š., Peřina, V.
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Volume:
16
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2006.03.012
Date:
January, 2007
File:
PDF, 731 KB
english, 2007
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