Electromechanical coupling constant extraction of thin-film...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 1998 / 01 Vol. 45; Iss. 1

Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator

Naik, R.S., Lutsky, J.J., Reif, R., Sodini, C.G.
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Volume:
45
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.646930
Date:
January, 1998
File:
PDF, 857 KB
english, 1998
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