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X-ray characterization techniques for the assessment of surface damage in crystalline wafers: A model study in AlN
Bobea, M., Tweedie, J., Bryan, I., Bryan, Z., Rice, A., Dalmau, R., Xie, J., Collazo, R., Sitar, Z.Volume:
113
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4798352
File:
PDF, 2.14 MB
english, 2013