Two-Mass MEMS Velocity Sensor: Internal Feedback Loop Design
Alshehri, Ali, Kraft, Michael, Gardonio, PaoloVolume:
13
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2012.2228849
Date:
March, 2013
File:
PDF, 1.72 MB
english, 2013